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ISO 18115-3:2022

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Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.


SDO ISO: International Organization for Standardization
Document Number ISO 18115
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 1
Publish Date Document Id Type View
Not Available ISO 18115-3:2022 Revision