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ISO/TS 25138:2019

Current Revision

Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry

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This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.


SDO ISO: International Organization for Standardization
Document Number ISO/TS 25138
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 8
Publish Date Document Id Type View
Not Available ISO/TS 25138:2019 Revision