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BSI BS EN 62047-8:2011

Current Revision

Semiconductor devices. Micro-electromechanical devices. Strip bending test method for tensile property measurement of thin films

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TENSILE PROPERTY MEASUREMENT OF THIN FILMS

SDO BSI: British Standards Institution
Document Number BS EN 62047-8
Publication Date June 30, 2011
Language en - English
Page Count 22
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
June 30, 2011 BS EN 62047-8:2011 Revision