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ASTM E986-97

Historical Revision

Standard Practice for Scanning Electron Microscope Beam Size Characterization

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1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material combination and is quantified through the measurement of an effective "apparent edge sharpness" for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces (for example, -deflection waveform generation) for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 200 000 X.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


SDO ASTM: ASTM International
Document Number E986
Publication Date Oct. 10, 1997
Language en - English
Page Count 3
Revision Level 97
Supercedes
Committee E04.11
Publish Date Document Id Type View
July 1, 2004 E0986-04 Revision
Oct. 10, 1997 E0986-97 Revision
April 1, 2024 E0986-04R24 Reaffirmation
June 1, 2017 E0986-04R17 Reaffirmation
April 1, 2010 E0986-04R10 Reaffirmation